Journal

Comparison of H2O2 and H2O oxidations on TDMAT absorbed on silicon(100) surface during reaction step of ALD–TiO2 process: A DFT study
Materials Today Communications (ISSN: 23524928)
38
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108125
มีนาคม 2024
นานาชาติ
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Article
10.1016/j.mtcomm.2024.108125
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Author