Journal

Kinetic Study of Tetrakis(Dimethylamido)Titanium and Titanium Tetrachloride Adsorption on a Silicon Surface in Atomic Layer Deposition: A DFT Calculation
Integrated Ferroelectrics (ISSN: 10584587)
225
1
93-103
พฤษภาคม 2022
นานาชาติ
Traditional
Article
10.1080/10584587.2022.2054059
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Author