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 หัวเรื่อง:ไม่มีชื่อไทย (ชื่ออังกฤษ : Structures and Optical Properties of TiO2 Thin Films Deposited on Unheated Substrate by DC Reactive Magnetron Sputtering) ผู้เขียน: Nirun Witit-anun, Prasertsak Kasemanankul, Surasing Chaiyakun, พิเชษฐ ลิ้มสุวรรณ สื่อสิ่งพิมพ์:pdf AbstractTitanium dioxide thin films (TiO2) were deposited on unheated substrate on a glass slide and Si-wafer by the DC reactive magnetron sputtering method at different total pressures. The crystal structure, surface morphology and optical transmittance were characterized by X-ray diffractometer, atomic force microscopy and UV-VIS-NIR spectrophotometer, respectively. The deposited films were transparent and the thickness was about 133-168 nm. XRD results showed that all samples possessed a polycrystalline structure and changed from the mixed phase of anatase and rutile, to rutile phases, as the total pressure decreased. An increase in the film’s roughness was observed with increasing sputtering pressure. The optical transmission measurements revealed that the mixed phases of anatase and rutile had higher transmittance than the pure rutile phase. The refractive index, in the visible spectrum was relatively high, while the energy band gap was found to be 3.25 eV. |
หัวเรื่อง:ไม่มีชื่อไทย (ชื่ออังกฤษ : Structures and Optical Properties of TiO2 Thin Films Deposited on Unheated Substrate by DC Reactive Magnetron Sputtering) ผู้เขียน:Nirun Witit-anun, Prasertsak Kasemanankul, Surasing Chaiyakun, พิเชษฐ ลิ้มสุวรรณ สื่อสิ่งพิมพ์:pdf AbstractTitanium dioxide thin films (TiO2) were deposited on unheated substrate on a glass slide and Si-wafer by the DC reactive magnetron sputtering method at different total pressures. The crystal structure, surface morphology and optical transmittance were characterized by X-ray diffractometer, atomic force microscopy and UV-VIS-NIR spectrophotometer, respectively. The deposited films were transparent and the thickness was about 133-168 nm. XRD results showed that all samples possessed a polycrystalline structure and changed from the mixed phase of anatase and rutile, to rutile phases, as the total pressure decreased. An increase in the film’s roughness was observed with increasing sputtering pressure. The optical transmission measurements revealed that the mixed phases of anatase and rutile had higher transmittance than the pure rutile phase. The refractive index, in the visible spectrum was relatively high, while the energy band gap was found to be 3.25 eV. |
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 Researcherดร. ทองใส จำนงการ, รองศาสตราจารย์ที่ทำงาน:ภาควิชาวิทยาศาสตร์พื้นฐานและพลศึกษา คณะวิทยาศาสตร์ ศรีราชา สาขาที่สนใจ:Biopolymer, ฺBiomaterials, Polymer hydrogel, Polymer blend and composite, Controlled-release and nanotechnology, Polymer synthesis and processing, Electrospinning, Rheology of soft materials, Adsorption Resume |
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 Researcherดร. ภ.พึ่งบุญ ปานศิลา, ผู้ช่วยศาสตราจารย์ที่ทำงาน:ภาควิชาวิทยาศาสตร์พื้นฐานและพลศึกษา คณะวิทยาศาสตร์ ศรีราชา สาขาที่สนใจ:Ultra-High Vacuum, Physics of Vacuum and Vacuum Technology, Physics of Thin Film and Thin Film Technology, Plasma Processing and Plasma Technology, Semiconductor Processing, Atomic layer deposition and Sputtering Process , Surface Chemistry, Materials for medical applications, Renewable Energy, Simulation for Gas adsorbed Surface, High Quality Thin Films Resume |