Journal

MeV ion exposure behaviour of PMMA resist polymer studied by synchrotron light spectroscopies
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (ISSN: 0168583X)
404
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238-242
สิงหาคม 2017
นานาชาติ
Traditional
Article; Proceedings
10.1016/j.nimb.2017.01.061
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Author