Journal

Kinetic study on initial surface reaction of titanium dioxide growth using tetrakis(dimethylamino)titanium and water in atomic layer deposition process: Density functional theory calculation
Chemical Physics (ISSN: 03010104)
562
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11653-1-10
ตุลาคม 2022
นานาชาติ
Traditional
Article
10.1016/j.chemphys.2022.111653
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Author